Improving the SiGeAsTe Ovonic Threshold Switching (OTS) Characteristics by Microwave Annealing for Excellent Endurance (>1011) and Low Drift Characteristics / J. Lee; S. H. Kim; S. Lee; S. Ban; S. Heo; D. Lee; O. Mosendz*; H. Hwang / 2022 IEEE Symposium on VLSI Technology & Circuits