Semiconductor Integrated Device & Process Lab.

Equipment

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Equipment

Super Critical High Pressure Equipment
Sputtering System (Vertical)
Sputtering System (Oxide)
Sputtering System (Metal)
Dual Sputtering System
Auto-RTP system
Cryogenic Probe Station
Auto-Probing System
Probe Station
Semiconductor Parameter Analyzers (Agilent B1500)
Conductive-Atomic Force Microscope
Photo Lithography System (MDA-400M)
Rapid Thermal Annealing (RTA)
Reactive Ion Etcher (RIE)
High Pressure Equipment (Small Chamber,2")
Digital Oscilloscope
Atomic Layer Deposition (ALD) System
RF Magnetron Reactive Sputtering System
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